UHV Focused Ion Beam-Electron Micro Scope
UHV FIB/SEM Column
ICE can customise the dipper to suit your system requirements.
- Under Ultra High Vacuum (UHV-SEM, UHV-FIB)
- High spatial resolution (<2.5 nm, high end model)
- Sophisticated user interface software
- Metal deposition gas source usable
- Variable columns available
- Canion31 FIB: 7 nm@1pA
- COBRA-FIB: 2.5 nm@1pA
- Mass filtered FIB: 5 nm@1pA
- ECLIPSE SEM: 10 nm@5pA
- ECLIPSE Plus SEM: 4 nm@1pA
UHV FIB/SEM System
UNISOKU provides various UHV FIB/SEM systems taking advantage of UHV/Low temperature technique acquired as UHV SPM maker.
System examples
- Low Temperature FIB/SEM system
- SPM with FIB/SEM System
- Multi Probe FIB/SEM System
- Dual FIB/SEM System
- Auger Spectroscopy, EDX System
